Main -> Pump systems -> Vacuum technology -> Diaphragm pumps
Diaphragm Pumps, ILMVAC®

For dry, oil-free applications in the rough and medium-high vacuum range ILMVAC diaphragm pumps are used world-wide in production, research and science as well as in industry, laboratory and education. As an economically and ecologically superior alternative to water operated vacuum pumps the ILMVAC diaphragm pump range always offers a versatile, practical solution for many diverse applications.

  • Vacuum distillation and filtration
  • Vacuum concentration
  • Vacuum drying
  • Manipulating and handing systems
  • Gel drying etc.

ILMVAC diaphragm pumps offer

  • different material for chemical (MPC) or physical (MP) processes
  • different flow rates from 0.6 m³/h to 16 m³/h
  • final pressures from 75 to < 1 mbar
  • pressure control using VCB521

ILMVAC diaphragm pumps are available in complete pump systems - LVS laboratory vacuum systems - with components and materials selected for optimal practical employment in laboratory and industry.
Also used as regeneration pumps in combination pumping systems (Chemvac), they fulfill their tasks due to outstanding chemical resistance and stable vacuum parameters.
All ILMVAC diaphragm pumps are compactly and functionally designed. Maintenance and service work is fast and easy. ILMVAC diaphragm pumps guarantee outstanding operation and possess a long life span. They are extremely quiet in operation and work without oil.
Diaphragm pumps with ATEX approval are available on request.

Single-stage diaphragm pumps, final vacuum < 75 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 065 E0.6115×165×145 2.310 92 41112
MP 105 E0.9235×140×277 6.2510 92 41142
MP 301 E2.3260×162×252 8.910 92 41171
MP 601 E3.8230×265×16911.256 92 40292
MP 1201 E8.3230×380×16918.356 92 40392
MPR 060 E0.6115×165×145 2.310 92 41212
MPC 110 E0.9235×140×277 6.310 92 41242
MPC 301 E2.3260×162×252 8.910 92 41271
(1)MPC 601 E3.8230×265×16911.256 92 40492
MPC 1201 E8.3230×380×16918.356 92 40532


Two-stage diaphragm pumps, final vacuum < 8 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 055 Z 0.5235×140×277 6.2510 92 41143
MP 101 Z 1.0195×235×145 6.556 92 40170
MP 301 Z 2.3230×265×16911.256 92 40282
MP 901 Z 6.8230×380×16918.356 92 40322
MPC 095 Z 0.5235×140×277 6.2510 92 41243
(2)MPC 101 Z 1.0195×235×145 6.556 92 40171
MPC 301 Z 2.3230×265×16911.256 92 40482
MPC 901 Z 6.8230×380×16918.356 92 40522
MPC 1801 Z12.0540×300×24032.856 92 41552


Three-stage diaphragm pumps, final vacuum < 2 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 201 T2.0200×260×15010.356 92 40176
MP 601 T4.5230×380×16918.356 92 40312
MPC 201 T2.0200×260×15010.356 92 40177
(3)MPC 601 T4.5230×380×16918.356 92 40512
MPC 1201 T8.3540×300×24032.856 92 41782


Four-stage diaphragm pumps, final vacuum < 1 mbar
TypeSuction rate
m3/h		W × D × H
mm		Weight
kg		Order No.
MP 101 V1.0200×260×15010.356 92 40180
MP 301 V2.3230×380×16918.356 92 40722



Further models on request.